Tyndall offer a range of State-of-the-Art Process Technology services which are available for use by Confirm Partners. An overview of
theses service is given here with full details available at the following link: https://www.tyndall.ie/process-technology
SUBSTRATES: A wide range of substrate types are available for use in the Tyndall P&PD labs. Resizing of some substrates is also
offered through our Laser Dicing service. LITHOGRAPHY: The P&PD laboratories offer a range of lithography exposure tools including
ebeam and nanoimprint lithography capability and associated resist processes. There is a suite of resist processes to suit different
applications ranging from wet/plasma etch to patterning by lift off. A range of resist application systems area available to suit different
applications and substrate types. MATERIAL DEPOSITION: We offer a wide range of material deposition systems and associated
materials. MATERIAL ETCH: We offer different plasma etch systems across the cleanrooms to meet our customer requirements,
etching of dielectrics, metals and polymers are available. THERMAL TREATMENTS: During the course of any device fabrication there
is a need to thermal treatment be it for silicon oxidation, implant activation, silicide formation, metal contact annealing or polymer curing.
We have systems suitable for all of these processes. ION IMPLANTATION: Primarily used in silicon device fabrication we have a
medium current system for implant of phosphorus, arsenic and boron species.
Applications/Uses in an Industrial Setting
Our services are suited to an extremely broad range of industrial and research applications. For specific inquiries please use the contact
information listed. Lists of available equipment for each application listed above can be found here: https://www.tyndall.ie/processtechnology
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