Process Technology Services

Associated Institution

Tyndall

Contact

General Inquiries

enquiry@tyndall.ie

Name of Piece of Equipment

Process Technology Services

Function or Purpose

Tyndall offer a range of State-of-the-Art Process Technology services which are available for use by Confirm Partners. An overview of theses service is given here with full details available at the following link: https://www.tyndall.ie/process-technology

Description

SUBSTRATES: A wide range of substrate types are available for use in the Tyndall P&PD labs. Resizing of some substrates is also offered through our Laser Dicing service. LITHOGRAPHY: The P&PD laboratories offer a range of lithography exposure tools including ebeam and nanoimprint lithography capability and associated resist processes. There is a suite of resist processes to suit different applications ranging from wet/plasma etch to patterning by lift off. A range of resist application systems area available to suit different applications and substrate types. MATERIAL DEPOSITION: We offer a wide range of material deposition systems and associated materials. MATERIAL ETCH: We offer different plasma etch systems across the cleanrooms to meet our customer requirements, etching of dielectrics, metals and polymers are available. THERMAL TREATMENTS: During the course of any device fabrication there is a need to thermal treatment be it for silicon oxidation, implant activation, silicide formation, metal contact annealing or polymer curing. We have systems suitable for all of these processes. ION IMPLANTATION: Primarily used in silicon device fabrication we have a medium current system for implant of phosphorus, arsenic and boron species.

Applications/Uses in an Industrial Setting

Our services are suited to an extremely broad range of industrial and research applications. For specific inquiries please use the contact information listed. Lists of available equipment for each application listed above can be found here: https://www.tyndall.ie/processtechnology

Research Applications

Please contact us for further information.

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